<data xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<row _id="1"><property>project</property><value>KupferDigital</value></row>
<row _id="2"><property>internal order</property><value>7F21110</value></row>
<row _id="3"><property>date of measurement</property><value>14.02.2022</value></row>
<row _id="4"><property>metallographic cross section id</property><value>ID3271</value></row>
<row _id="5"><property>region of interest</property><value>e</value></row>
<row _id="6"><property>coating</property><value>none</value></row>
<row _id="7"><property>final metallographic treatment</property><value>polished</value></row>
<row _id="8"><property>microscope</property><value>Zeiss Gemini 300</value></row>
<row _id="9"><property>cathode</property><value>field emission cathode</value></row>
<row _id="10"><property>measuring software</property><value>Aztec</value></row>
<row _id="11"><property>measuring software version</property><value>4.2</value></row>
<row _id="12"><property>normalisation</property><value>used</value></row>
<row _id="13"><property>matrix correction</property><value>extendet set</value></row>
<row _id="14"><property>working distance</property><value>9.5</value></row>
<row _id="15"><property>unit working distance</property><value>mm</value></row>
<row _id="16"><property>process time</property><value>5</value></row>
<row _id="17"><property>accelerating voltage</property><value>20</value></row>
<row _id="18"><property>unit accelerating voltage</property><value>kV</value></row>
<row _id="19"><property>magnification</property><value>50</value></row>
<row _id="20"><property>diameter aperture</property><value>50</value></row>
<row _id="21"><property>unit diameter aperture</property><value>µm</value></row>
<row _id="22"><property>pixel dwell time</property><value>20000</value></row>
<row _id="23"><property>unit pixel dwell time</property><value>µs</value></row>
<row _id="24"><property>channels</property><value>2048</value></row>
<row _id="25"><property>high current</property><value xsi:nil="true" /></row>
<row _id="26"><property>unit chemical concentration</property><value>weight percent</value></row>
<row _id="27"><property>number of columns</property><value>41</value></row>
<row _id="28"><property>number of rows</property><value>5</value></row>
<row _id="29"><property>horizontal spacing</property><value>50</value></row>
<row _id="30"><property>unit horizontal spacing</property><value>µm</value></row>
<row _id="31"><property>vertical spacing</property><value>50</value></row>
<row _id="32"><property>unit vertical spacing</property><value>µm</value></row>
<row _id="33"><property>global position x</property><value xsi:nil="true" /></row>
<row _id="34"><property>global position y</property><value xsi:nil="true" /></row>
</data>
